Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1997-07-07
1999-08-31
Kim, Robert H.
Optics: measuring and testing
By particle light scattering
With photocell detection
356351, 356361, G01B 902
Patent
active
059460962
ABSTRACT:
A new method for measuring refractive index, small angle, pressure or temperature is disclosed. The method of the present invention utilizes a heterodyne interferometry technique to measure the phase difference between s-(vertical) and p-(horizontal) polarizations, and then substitutes the difference into Fresnel's equations so as to obtain the physical values of the medium to be tested, such as refractive index, small angle, pressure or temperature.
REFERENCES:
Rohlin, "An Interferometer for Precision Angle Measurements", Appl. Opt. 2 (7), pp. 762-763 (Jul. 1963).
Malacara et al. "Interferometric Measurement of Angles", Appl. Opt. 9 (7), pp. 1630-1633 (Jul. 1970).
Ulrich et al., "Measurement of thin film parameters with a prism coupler", Appl. Opt. 12(12), pp. 2901-2908 (Dec. 1973).
Chapman, "Interferometric Angular Measurement", Appl. Opt. 13 (7), pp. 1646-1651 (Jul. 1974).
Yoder et al., "Active annular-beam laser autocollimator system", Appl. Opt. 14 (8), pp. 1890-1895 (Aug. 1975).
Born et al., Principles of Optics, 6th ed., Pergamon Press, Oxford, U.K., pp. 48-50 (1980).
Kitajima et al., "Use of a total absorption ATR method to measure complex refractive indices of metal-foils", J. Opt. Soc. Am, 70(12), pp. 1507-1513 (Dec. 1980).
Kirsch, "Determining the refractive index and thickness of thin films from prism coupler measurements", Appl. OPt. 20 20(12), pp. 2085-2089 (Jun. 1981).
Ennos et al. "High accuracy profile measurements of quasi-conical mirror surface by laser autocollimation", Precis. Eng. 4(1), pp. 5-8 (Jan. 1982).
Azzam, "Simple and direct determination of complex refractive index and thickness of unsupported or embedded thin films by combined reflection and transmission ellipsometry at 45.degree. angle of incidence", J. Opt. Soc. Am., 73, pp. 1080-1082 (1983).
Azzam, "Maximum minimum reflectance of parallel-polarized light at interfaces between transparent and absorbing media", J. Opt. Soc. Am. 73(7), pp. 959-962 (Jul. 1983).
Schuda, "High-precision, wide-range, dual-axis, angle monitoring system", Rerv. Sci. Instrum. 54 (12), pp. 1648-1652 (Dec. 1983).
Luther et al., "Single axis photoelectronic autocollimator", Rev. Sci. Instrum. 55 (5), pp. 747-750 (May 1984).
Jarvis et al., "Critical-angle measurement of refractive index of absorbing materials: an experimental study", J. Phys. E. Sci. Instrum., 19, pp. 296-298 (1986).
Shi et al., "New optical method for measuring small-angle rotations", Appl Opt. 27 (20), pp. 4342-4344 (Oct. 1988).
Beck et al., "Evaluation of optical properties of decorative coating by spectroscopic ellipsometry", Thin Solid Films, 220, pp. 234-240 (1992).
Akimoto et al., "Brewster and pseudo-Brewster angle technique for determination of optical constants", Jpn. J. Appl. Phys., 31, pp. 120-122 (Jan. 1992).
Huang et al., "Angle measurement based on the internal-reflection effect: a new method", Appl Opt. 31 (28), pp. 6047-6055 (Oct. 1992).
Nee et al., "Accurate null polarimetry for measuring the refractive index of transparernt materials", J. Opt. Soc. Am. A. 10, pp. 2076-2083 (1993).
Shi et al., "Improving the linearity of the Michelson interferometric angular measurement by a parameter compensation method", Appl. Opt. 32 (1), pp. 44-51 (Jan. 1993).
Wang, "Determination of optical constants of absorbing thin films from relectance and transmittance measurements with oblique incidence", J. Opt. Soc. Am. A, 11 (8), pp. 2331-2337 (Aug 1994).
Levesque et al., "Precise thickness and refractive index determination of polymide films using attenuated total reflection", Appl. Opt. 33(34), pp. 8036-8040 (Dec. 1994).
Rigneault et al., "Nonlinear totally reflecting prism coupler: thermomechanic effects and intensity-dependent refractive index of thin films", Appl. Opt. 34 (21), pp. 4358-4369 (Jul. 1995).
Huang et al., "Angle measurement based on the internal-reflection effect and the use of right-angle prisms", Appl. Opt. 34 (22), pp. 4976-4981 (Aug. 1995).
Chiu et al., "Refractive-index measurement based on the effects of total internal reflection and the uses of heterodyne interferometry", Appl. Opt. 36 (13), pp. 1-4 (May 1997).
Chiu et al., "Angle measurement using total-internal-reflection heterodyne interferometry", Opt. Eng. 36 (6), pp. 1-4 (Jun. 1997).
Chen Chuan-Chuan
Chen Horn-Haw
Chiu Ming-Horng
Lee King-Hung
Su Der-Chin
Industrial Technology Research Institute
Kim Robert H.
LandOfFree
Heterodyne interferometry method for measuring physical paramete does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Heterodyne interferometry method for measuring physical paramete, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heterodyne interferometry method for measuring physical paramete will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2427712