Heterodyne interferometer system

Details Heterodyne interferometer system Heterodyne interferometer system

1985-03-12

1987-08-25

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356358, G01B 902

Patent

active

046889400

ABSTRACT:
A heterodyne interferometer system utilizes a single stabilized frequency linearly polarized laser input beam (18) from a light source (10) which is provided to an acousto-optic device (20) along with a frequency stabilized electrical reference signal (32) from an oscillator (30) for transforming the input beam (18) into a pair of orthogonally polarized beams (40,50) differing in frequency by the reference signal frequency prior to providing these beams (40,50) to a polarization type interferometer (70). A mixing polarizer (60) mixes the beams (46,56) after they traverse the interferometer (70) and provides the mixed beams (62,64) to a photoelectric detector (65) where they are utilized to produce an electrical measurement signal (66). This electrical measurement signal (66) is processed in a phase meter/accumulator (68) along with the reference signal (32) to produce an output signal (80) which is the sum of phase difference on a cycle-by-cycle basis between the measurement signal (66) and the reference signal (32). The phase meter/accumulator (68) includes an analog-to-digital converter (83) and a memory register (92) for the previous cycle, with the measurement resolution being determined by the number of bits of the analog-to-digital converter (83).

REFERENCES:
patent: 3656853 (1972-04-01), Bagley et al.
Domyshev et al., "Measurements of Small Mechanical Displacements and Vibrations of Specimens Using a Laser", Instrum. & Exp. Tech., vol. 22, No. 3, pp. 837-839, 6/79.

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