Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Patent
1990-12-12
1993-08-10
Shah, Mukund J.
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
556 27, 556 64, C07F 506
Patent
active
052350789
ABSTRACT:
The invention relates to heterocyclic organometallic compounds formula I below and to the use thereof for the production of thin films and layers on substrates by gas phase deposition. ##STR1##
REFERENCES:
patent: 4268455 (1981-05-01), Langer et al.
Beachley et al. J. Inorg. Chem., 14(10), 2534-7, 1975.
Clark et al. J. Organometallic Chemistry, 13(1) 61-71, 1968.
Hostalek Martin
Lokai Matthias
Pohl Ludwig
Gupta Y. N.
Merck Patent Gesellschaft mit beschrankter Haftung
Shah Mukund J.
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