Measuring and testing – With fluid pressure – Leakage
Patent
1984-06-21
1990-05-01
Williams, Hezron E.
Measuring and testing
With fluid pressure
Leakage
73 493, G01M 320
Patent
active
049207857
ABSTRACT:
A method for testing the hermeticity of a sealed cavity within a microelectronic, semiconductor, or other electronic component package includes pressure bombing the package within a detector-fluid bath, attempting thereby to introduce liquid detector fluid into the cavity through any leaks. A detector fluid is used whose vapor state possesses a distinctive physical characteristic that is detectable with known instrumentation. The package is then removed from the bath to permit a quantity of any detector fluid introduced into the cavity to vaporize and evolve for detection. Heating and vibrating the package may be employed to accelerate detector fluid outgassing, together with vacuum withdrawal of the vapor, and detection may employ measurement of infrared absorption. A system for detecting evolving detector fluid vapor includes both a test cell with which to confine the vapor and the instrumentation for measuring infrared absorption of test cell contents. The volume of the test cell is proportioned to the cavity size to inhibit dilution of evolving detector-fluid vapor beyond the detection capabilities of the instrumentation employed.
REFERENCES:
patent: 3091114 (1963-05-01), Webster
patent: 3416359 (1968-12-01), Durbin et al.
patent: 3479862 (1967-03-01), Trapp et al.
patent: 3548636 (1968-09-01), Litant
patent: 3591944 (1971-07-01), Wilcox
patent: 3672207 (1972-06-01), Cramp et al.
patent: 3675468 (1972-07-01), Caccamese et al.
patent: 3729983 (1973-05-01), Coppens
patent: 3738158 (1973-06-01), Farrell et al.
patent: 3762212 (1983-10-01), Morley et al.
patent: 3902068 (1975-08-01), Wood
patent: 4158960 (1979-06-01), White et al.
patent: 4282744 (1981-08-01), Dick
MIL-STD-883C, 25 Aug. 1983, Method 1014.5, Method 1014.6 (Seal).
"Leak Detection of Hermetically Sealed Devices", Jim Anthony, InterTest Corporation, Automatic Testing/Ate, Test & Measurement Work, /Jan. 1985.
Pages 1-3 and 13-16 taken from descriptive literation of Trio-Tech International of Burbank, California, these pages appearing as if they might come from an annular report of the corporation.
Varian Publication entitled "New Dimensions in Leak Detection".
Web Technology, Inc.
Williams Hezron E.
LandOfFree
Hermeticity testing method and system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Hermeticity testing method and system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Hermeticity testing method and system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-821739