Hermetically sealed radiation imager

Details Hermetically sealed radiation imager Hermetically sealed radiation imager

1994-08-19

1997-06-24

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257432, H01L 310232

Patent

active

056419848

ABSTRACT:
A hermetically packaged radiation imager includes a moisture barrier cover disposed over the imaging array and a hermetic seal structure disposed around the periphery of the moisture barder cover to seal the cover to the underlying substrate. The hermetic seal structure comprises a solder seal disposed in contact with the moisture barrier cover and a dielectric material layer disposed between the solder seal and conductive lines extending from the imager army across the substrate surface. The hermetic seal structure further includes a primer layer that is disposed between the dielectric material layer and the solder seal to provide a foundation to which the solder seal adheres. The dielectric material layer is deposited in an atomic layer epitaxy technique, thus providing a thin layer having high structural integrity.

REFERENCES:
patent: 4058430 (1977-11-01), Suntola et al.
patent: 5132539 (1992-07-01), Kwasnick et al.
patent: 5179284 (1993-01-01), Kingsley et al.
patent: 5187369 (1993-02-01), Kingsley et al.
patent: 5401668 (1995-03-01), Kwasnick et al.
patent: 5463225 (1995-10-01), Kwasnick et al.

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