Hermetically sealed pressure sensor and method thereof

Details Hermetically sealed pressure sensor and method thereof Hermetically sealed pressure sensor and method thereof

1994-06-06

1995-10-03

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 73754, 73726, 73727, G01L 708

Patent

active

054542707

ABSTRACT:
A differential pressure sensor (10) has a sensor die (16) attached to a stress isolation package base (12) with a bonding glass (27) having a similar coefficient of thermal expansion. The bonding glass, and alternately an aluminum layer, provides a hermetic seal between the stress isolation base and sensor die. Pressure is applied to the sensor die port (24). A plastic housing (14) is attached to the stress isolation base with an adhesive (29). A port (23) in the plastic housing is filled with a silicone gel (22). A second pressure source is transferred by way of the silicone gel to the sensor die. Any hostile chemical entering the via contacts the first surface of the sensor die to assert pressure against a transducer circuit (25) to generate the electrical signals representative of the applied pressure but are isolated from the sensitive interconnects by the hermetic seal.

REFERENCES:
patent: 4287501 (1981-09-01), Tominga et al.
patent: 4314225 (1982-02-01), Tominaga et al.
patent: 4833920 (1989-05-01), Knecht et al.
patent: 4878385 (1989-11-01), Lloyd
patent: 4942383 (1990-07-01), Lam et al.
patent: 5134887 (1992-08-01), Bell
patent: 5257547 (1993-11-01), Boyer

Affiliated with

Also associated with

Rating

Hermetically sealed pressure sensor and method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Hermetically sealed pressure sensor and method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Hermetically sealed pressure sensor and method thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1071737