Hermetically sealed multilayer electrical feedthru

Details Hermetically sealed multilayer electrical feedthru Hermetically sealed multilayer electrical feedthru

1988-02-01

1990-05-01

Laroche, Eugene R.

357 73, 357 54, H01L 2348, H01L 2946, H01L 2330, H01L 2962

Patent

active

049223232

ABSTRACT:
A method for producing miniature, planar, hermetically sealed, electrical feedthrus having multiple layers of molybdenum conductors separated by aluminum which is anodized and selectively etched for providing supports for the multilayer. The exposed molybdenum is cleaned and oxidized and sealed with glass to provide a hermetic seal. Contact portions of the molybdenum are cleaned and plated whereby the contacts will accept a contact seal.

REFERENCES:
patent: 4023197 (1977-05-01), Magdo et al.
patent: 4163239 (1979-07-01), Carter
patent: 4197555 (1980-04-01), Uehara et al.
patent: 4308090 (1981-12-01), Te Velde et al.
patent: 4472730 (1984-09-01), Ohta
patent: 4729063 (1988-03-01), Matsuo et al.
Mathers "Hybrid Microelectronic Package" IBM Technical Disclosure Bulletin vol. 12, No. 8, Jan. 1970.

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