Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1992-03-05
1992-12-22
Griffin, Donald
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
29 2541, 73724, G01L 912, H01G 516
Patent
active
051738368
ABSTRACT:
A hermetically sealed interface is constructed with a substrate (101) having a first surface (103) with a first orifice (201). The substrate (101) also has an opposing second surface (105) with a second orifice (205). The first and second orifices (201, 205) are connected via a passageway (107). The passageway (107) has an inner surface (209) with a first metal coating (111). The first metal coating (111) and the substrate (101) provide a first predetermined thermal coefficient of expansion for the passageway (107). A plug (221) with an outer surface (223) has a second metal coating (225). The second metal coating (225) and the plug (221) provide a second predetermined thermal coefficient of expansion substantially similar to the first predetermined thermal coefficient of expansion of the passageway (107). The plug (221) is disposed in the passageway (107) of the substrate (101). The first metal coating (111), of the inner surface ( 209) of the passageway (107), and the second metal coating (225), of the outer surface (223) of the plug (221), are bonded together and provide, with the plug, (221) a hermetic barrier between the first and second orifices (201, 205) of the substrate (101). Preferably, this hermetically sealed interface is used in a capacitive pressure sensor.
REFERENCES:
patent: 3748571 (1973-07-01), Kurtz
patent: 4833039 (1989-05-01), Mitoff et al.
patent: 4875134 (1989-10-01), Kuisma
Chason Marc K.
Chen Shiuh-Hui
Stamm Gregory D.
Tomase Joseph P.
Griffin Donald
Melamed Phillip H.
Motorola Inc.
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