Hermetically sealed active microwave integrated circuit

Details Hermetically sealed active microwave integrated circuit Hermetically sealed active microwave integrated circuit

1979-06-15

1981-06-30

James, Andrew J.

Wave transmission lines and networks

Automatically controlled systems

With control of equalizer and/or delay network

357 80, 357 81, 333247, H01L 2302, H01L 2312, H01L 3902

Patent

active

042765587

ABSTRACT:
An active microwave amplifier element is hermetically sealed on the opposite side of a dielectric substrate from the side in which input and output signals are transmitted. The active element is mounted on a ground plane and is electrically connected to coplanar waveguide elements which are coplanar with the ground plane. The coplanar waveguide elements are electrically connected to associated microwave strips through the dielectric substrate and said holes are also sealed. A cap having similar coefficient of thermal expansion to the dielectric substrate is mounted on the ground plane to enclose and hermetically seal the active element.

REFERENCES:
patent: 3611059 (1971-10-01), Carley
patent: 3705255 (1972-12-01), Low et al.
patent: 3745487 (1973-07-01), Milard et al.
patent: 3828228 (1974-08-01), Wong et al.
patent: 3898594 (1975-08-01), Hochberg et al.
patent: 3908188 (1975-09-01), Kawamoto
patent: 3943556 (1976-03-01), Wilson
patent: 4183041 (1980-01-01), Goel

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