Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Having diverse electrical device
Reexamination Certificate
2008-03-25
2008-03-25
Pham, Thanh Van (Department: 2823)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Having diverse electrical device
C438S026000, C438S033000, C438S051000, C438S055000, C438S058000, C438S064000, C438S068000, C438S106000, C438S125000, C438S126000, C438S127000, C257SE33056
Reexamination Certificate
active
11416864
ABSTRACT:
The invention is directed to a hermetically sealed device and a method for making such device. The device includes optical, micro-electromechanical, electronic and opto-electronic devices, having a substrate with one or a plurality of optical, opto-electronic, electronic or micro-electromechanical (“MEMS”) elements either singly or in combination that are located on a substrate; a covering having a top part and an extension extending a distance from the top part from the top part, an adhesive that is used to bond the extension portion of the covering to the substrate; and a sealing agent for hermetically sealing the area where the covering extension is bonded to the substrate. In the method of the invention the sealing agent is applied using atomic layer deposition techniques.
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Corning Incorporated
Douglas Walter M.
Pham Thanh Van
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