Hermetic sealing of silicon

Details Hermetic sealing of silicon Hermetic sealing of silicon

1986-10-30

1987-10-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

357 25, 357 26, 357 74, 228153, 228165, 228171, 228179, 1563042, 1563082, 1563096, 156329, 29 2541, 148DIG12, 437247, H01L 700

Patent

active

047014245

ABSTRACT:
A method of forming a hermetic seal between two silicon wafers includes forming opposing troughs in each of the two wafers. In each trough are formed an isolation layer, a diffusion barrier and a tub of polysilicon. A gold strip is put on one polysilicon tub and the two silicon wafers are brought together and heated in a thermal gradient oven. A silicon gold eutectic is formed which migrates to the diffusion barrier of the silicon wafer.

REFERENCES:
patent: 3351816 (1967-11-01), Sear et al.
patent: 3471631 (1969-10-01), Quintana
patent: 3508980 (1970-04-01), Jackson, Jr. et al.
patent: 3689357 (1972-09-01), Jordan
patent: 4177496 (1979-12-01), Bell et al.
patent: 4184189 (1980-01-01), Davis et al.
patent: 4207604 (1980-06-01), Bell
patent: 4208782 (1980-07-01), Kurtz et al.
patent: 4236137 (1980-11-01), Kurtz et al.
patent: 4261086 (1981-04-01), Giachino et al.
patent: 4345299 (1982-08-01), Ho
patent: 4386453 (1983-06-01), Giachino et al.
patent: 4390925 (1983-06-01), Freud
patent: 4415948 (1983-11-01), Grantham et al.
patent: 4420790 (1983-12-01), Golke et al.
patent: 4424713 (1984-01-01), Kroninger, Jr. et al.
patent: 4612082 (1986-09-01), Yasumoto et al.

Affiliated with

Also associated with

Rating

Hermetic sealing of silicon does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Hermetic sealing of silicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Hermetic sealing of silicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1612406