Hermetic enclosure for treating a workpiece with a solvent

Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...

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134 77, 134131, 134200, B08B 1502

Patent

active

057996776

ABSTRACT:
An apparatus for treating a workpiece, the apparatus including a carriage for holding the workpiece, a first station for transferring the workpiece into and out of the carriage, a first chamber for holding treating fluid, a second station for transferring the workpiece between the carriage and the first chamber, and a mechanism for staging the carriage, the mechanism capable of positioning the carriage at the first station and at the second station and the first chamber capable of being isolated from atmosphere when the carrier is located at the second station.

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patent: 5313966 (1994-05-01), Sadamori

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