Helical optical pulse stretcher

Details Helical optical pulse stretcher Helical optical pulse stretcher

2007-11-21

2009-10-27

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07609363

ABSTRACT:
A lithographic system and method using an illumination system, a single pass pulse stretcher, an optical system, a patterning device and a projection system. The optical system is arranged around the single pass pulse stretcher. A beam enters the single pass stretcher and is reflected in a helical path using the optical system for multiple passes through the single pass pulse stretcher. The single pass pulse stretcher can include two 90° prisms, with a beam splitter located therebetween. The optical system can include first and second prisms. At least one of the first and second prisms can be a roof prism. The first and second prisms can have at least one surface oriented so as to direct the beam into the helical path. The optical system can have at least one mirror, or a plurality of mirrors.

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patent: 7084959 (2006-08-01), Albert
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patent: 2005/0190452 (2005-09-01), Govorkov et al.
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patent: 1-132186 (1989-05-01), None
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patent: 6-214187 (1994-08-01), None
Office Action and Translation of Office Action for Japanese Patent Application No. 2005-151508 mailed Apr. 25, 2008, 6 pgs.

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