Height position detector for work held on chuck table

Details Height position detector for work held on chuck table Height position detector for work held on chuck table

2008-08-12

2009-08-25

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Position or displacement

Reexamination Certificate

active

07580136

ABSTRACT:
A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which the spot shape of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a first beam splitter by which the laser beam with the spot shape formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed to irradiate the work therewith; a second beam splitter for splitting the reflected light reflected by the work; a first light receiving element for receiving the reflected light transmitted through the second beam splitter; a second light receiving element for receiving the reflected light reflected by the second beam splitter; a light reception region restricting part for restricting the light reception region for the reflected light received by the second light receiving element; and a controller for determining the height position of the upper surface of the work on the basis of the ratio between the quantity of light received by the first light receiving element and the quantity of light received by the second light receiving element.

REFERENCES:
patent: 6774995 (2004-08-01), Quist et al.
patent: 7428062 (2008-09-01), Nomaru
patent: 7459655 (2008-12-01), Nomaru
patent: 2005/0224475 (2005-10-01), Nomaru
patent: 2005/0236381 (2005-10-01), Nomaru
patent: B2 3408805 (2002-07-01), None
patent: A 2007-152355 (2007-06-01), None

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