Measuring and testing – With fluid pressure – Dimension – shape – or size
Patent
1984-10-09
1986-08-26
Levy, Stewart J.
Measuring and testing
With fluid pressure
Dimension, shape, or size
73 376, 324 73PC, G01B 1316, G01R 3102
Patent
active
046075259
ABSTRACT:
The invention of this disclosure is a profiling and testing system that uses an air probe to determine the contour of a wafer containing a plurality of dies so that an electrical sensor may automatically step from die to die and test the completed dies in the wafer.
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Roch Jacques
Turner Michael D.
FitzGerald Thomas R.
General Signal Corporation
Levy Stewart J.
Reichman Ronald
Williams Hezron E.
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