Height measurement device and height measurement method

Details Height measurement device and height measurement method Height measurement device and height measurement method

1997-08-11

2000-04-18

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, G01B 1100

Patent

active

060521899

ABSTRACT:
The object of the present invention is to provide a height measurement device that can accurately measure the height of an object to be measured, and that can easily and precisely adjust the focal point of an optical system. According to the present invention, a height measurement device, which forms an image of a light point generated by a light source on a surface of a measured object via an irradiation side focusing lens, which forms an image of the formed image of the light point on a light point position detector via a light reception side focusing lens, and measures a height of the measured object according to the light point position on the light point position detector, comprises: a stage perpendicularly movable with the measured object mounted thereon; a camera for obtaining a light point image formed on a target face on the stage; and a controller for detecting a position of the stage or of the radiation focusing lens as a focal point, at which a light quantity on a predetermined pixel in the light point image obtained by the camera becomes a maximum level, while moving the stage or the irradiation side focusing lens.

REFERENCES:
patent: 4209252 (1980-06-01), Arditty et al.
patent: 4743771 (1988-05-01), Sacks et al.
patent: 5394100 (1995-02-01), Bohler et al.
patent: 5450206 (1995-09-01), Caillat et al.
patent: 5465152 (1995-11-01), Bilodeau et al.

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