Height measurement apparatus using laser light beam

Details Height measurement apparatus using laser light beam Height measurement apparatus using laser light beam

1992-06-22

1993-12-21

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1114

Patent

active

052725170

ABSTRACT:
In a height measurement apparatus, a laser light beam is applied to a surface of a height-measurement object. A portion of the laser light beam is reflected at the surface of the object. An optical position sensor is exposed to the portion of the laser light beam which is reflected at the surface of the object. The optical position sensor generates a position signal depending on a point at which the reflected laser light beam meets the optical position sensor. The position signal represents a height of the surface of the object. A position of the laser light beam is vibrated relative to the surface of the object. The height represented by the position signal is temporally averaged into a mean height while the position of the laser light beam is vibrated relative to the surface of the object. The mean height is defined as a final measurement result.

REFERENCES:
patent: 4589773 (1986-05-01), Ido et al.
patent: 4971443 (1990-11-01), Koyagi

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