Height calibration of scanning probe microscope actuators

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C073S001790, C073S105000, C250S341500

Reexamination Certificate

active

07041963

ABSTRACT:
A mechanism for calibrating a scanning probe microscope is presented. The calibration mechanism operates to apply an input signal to an actuator to cause acceleration of the actuator and to measure a value indicative of deflection of a cantilever attached to the actuator, as a result of the actuator acceleration. The measured deflection value is used to determine a corresponding value of actuator displacement.

REFERENCES:
patent: 5051646 (1991-09-01), Elings et al.
patent: 5066858 (1991-11-01), Elings et al.
patent: 5077473 (1991-12-01), Elings et al.
patent: 5081390 (1992-01-01), Elings
patent: 5155359 (1992-10-01), Monahan
patent: 5198715 (1993-03-01), Elings et al.
patent: 5200617 (1993-04-01), Hayes et al.
patent: 5306919 (1994-04-01), Elings et al.
patent: 5384507 (1995-01-01), Takada et al.
patent: 5418363 (1995-05-01), Elings et al.
patent: 5463897 (1995-11-01), Prater et al.
patent: 5469734 (1995-11-01), Schuman
patent: 5497656 (1996-03-01), Kado et al.
patent: 5557156 (1996-09-01), Elings
patent: 5568003 (1996-10-01), Deck
patent: 5641897 (1997-06-01), Schuman
patent: 5644512 (1997-07-01), Chernoff et al.
patent: 5665905 (1997-09-01), Bartha et al.
patent: 5773824 (1998-06-01), Flecha et al.
patent: 5801381 (1998-09-01), Flecha et al.
patent: 5804708 (1998-09-01), Yamanaka et al.
patent: 5825670 (1998-10-01), Chernoff et al.
patent: 5877497 (1999-03-01), Binnig et al.
patent: 5898106 (1999-04-01), Babcock et al.
patent: 5920067 (1999-07-01), Cresswell et al.
patent: 6016684 (2000-01-01), Scheer et al.
patent: 6049115 (2000-04-01), Takahashi et al.
patent: 6237399 (2001-05-01), Shivaram et al.
patent: 6244103 (2001-06-01), Berghaus et al.
patent: RE37299 (2001-07-01), Amer et al.
patent: RE37404 (2001-10-01), Harp et al.
patent: 6340858 (2002-01-01), Jaenker
patent: RE37560 (2002-02-01), Elings
patent: 6357285 (2002-03-01), Allen
patent: 6410907 (2002-06-01), Cleveland et al.
patent: 6661004 (2003-12-01), Aumond et al.
International Search Report for Application No. PCT/US2004/034390 dated Apr. 12, 2005.
Schaffer, T.E., ET AL., “Characterization and Optimization of the Detection Sensitivity of an Atomic Force Microscope for Small Cantilevers”, Journal of Applied Physics AIP USA, vol. 84, No. 9, Nov. 1, 1998, pp. 4661-4666.
Kindt, Johannes H. ET AL., Atomic Force Microscope Detector Drift Compensation by Correlation of Similar Traces Acquired at Different Setpoints, Review of Scientific Instruments, American Institute of Physics, UA, vol. 73, No. 6, Jun. 2002, pp. 2305-2307.
Aumond, B.D. ET AL., “High Precision Metrology by Means of a Novel Stero Imaging Technique Based on atomic Force Microscopy”, Proceeding of the SPIE—The International Society for Optical Engineering SPIE—Int. Soc. Opt. Eng USA, vol., 4344, Feb. 26, 2001, pp. 46-57.
Pingali, G.S. ET AL., “Restoration of Scanning Probe Microscope Images”, Applications of Computer Vision, Proceeding, 1992, IEEE Workshop on Palm Springs, CA, USA, Nov. 30-Dec. 2, 1992, Los Alamitos, CA, USA, IEEE Comput. Soc, US, Nov. 30, 1992, pp. 282-289.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Height calibration of scanning probe microscope actuators does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Height calibration of scanning probe microscope actuators, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Height calibration of scanning probe microscope actuators will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3604561

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.