Height calibration of scanning probe microscope actuators

Details Height calibration of scanning probe microscope actuators Height calibration of scanning probe microscope actuators

2006-05-09

2006-05-09

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C073S001790, C073S105000, C250S341500

Reexamination Certificate

active

07041963

ABSTRACT:
A mechanism for calibrating a scanning probe microscope is presented. The calibration mechanism operates to apply an input signal to an actuator to cause acceleration of the actuator and to measure a value indicative of deflection of a cantilever attached to the actuator, as a result of the actuator acceleration. The measured deflection value is used to determine a corresponding value of actuator displacement.

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