Heavy-load nanopositioner with dual-parallel flexure design

Details Heavy-load nanopositioner with dual-parallel flexure design Heavy-load nanopositioner with dual-parallel flexure design

2005-04-15

2008-03-25

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

07348709

ABSTRACT:
A positioning device for heavy loads is provided. The positioning device includes a frame and a stage disposed or integrally defined within the frame. The stage is dimensioned and configured to be translatable within the frame in at least one axis of motion. At least one dual-parallel flexure connects the stage to the frame.

REFERENCES:
patent: 4667415 (1987-05-01), Barsky
patent: 5281884 (1994-01-01), Basavanhally et al.
patent: 5903085 (1999-05-01), Karam
patent: 6240799 (2001-06-01), Yau
patent: 6467761 (2002-10-01), Amatucci et al.
patent: 6638625 (2003-10-01), Draeger

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