Electric resistance heating devices – Heating devices – Radiant heater
Patent
1993-03-23
1996-02-06
Jeffery, John A.
Electric resistance heating devices
Heating devices
Radiant heater
118 725, 118 501, 118 728, 374208, H01L 21205, F26B 1900
Patent
active
054902282
ABSTRACT:
A wafer heater for use in a semiconductor producing apparatus or the like. The heater includes a discoidal substrate made of a dense ceramic, and a resistance heating element buried in the substrate. The surface of the substrate other than that surface upon which a wafer is to be placed for heating is a flat surface. The heating unit further includes a hollow sheath of which inner pressure is not substantially varied even when the pressure inside the chamber changes and is partially embedded and joined to the heater, and a thermocouple inserted into the hollow sheath.
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Nobori Kazuhiro
Soma Takao
Ushikoshi Ryusuke
Jeffery John A.
NGK Insulators Ltd.
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