Heating system, vacuum process chamber comprising such a heating

Details Heating system, vacuum process chamber comprising such a heating Heating system, vacuum process chamber comprising such a heating

1995-12-21

1998-12-22

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912154, 21912157, 21912148, B23K 1000

Patent

active

058522751

ABSTRACT:
A resistance heating system prevents the generation of magnetic fields by constructing the heating section as a looped current circuit. The heating current circuit as a whole is connected to the potential in order to, at the same time, use the heating section in a process chamber as a process electrode. In an AC-connection of the heating current circuit, a capacitive shielding prevents a reaction of the electrode operating potential with respect to the primary side of a transforming heating current actuator.

REFERENCES:
patent: 3706872 (1972-12-01), Trabilcy
patent: 4101724 (1978-07-01), Heine et al.
patent: 4325361 (1982-04-01), Harrison
patent: 4499369 (1985-02-01), Gibb
patent: 4870245 (1989-09-01), Price et al.
patent: 4994706 (1991-02-01), Leung et al.
patent: 5403992 (1995-04-01), Cole
patent: 5426351 (1995-06-01), Imura

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