Heating stage

Details Heating stage Heating stage

2006-07-25

2006-07-25

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C392S416000, C219S390000, C219S405000, C219S411000, C118S724000, C118S050100

Reexamination Certificate

active

07082261

ABSTRACT:
A heating stage according to the present invention comprises a flat stage portion on which a work piece is placed, a glass section having cylindrical portion in which two or more lamps are disposed as a heating unit, and a metal section having a cylindrical portion and a bottom portion forming an inner space by fixing the metal section and the glass section integrally wherein the inner space is under reduced pressure, and inert gas is filled.

REFERENCES:
patent: 4694143 (1987-09-01), Nishimura et al.
patent: 6753507 (2004-06-01), Fure et al.
patent: 2003/0183616 (2003-10-01), Goto
patent: P2002-329566 (2002-11-01), None
patent: P2004-6242 (2004-01-01), None

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