Heating resistor and method for making same

Electric heating – Heating devices – Combined with diverse-type art device

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346 76PH, 219543, B41J 320, H05B 312

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active

048496057

ABSTRACT:
A heating resistor includes a conductive material, and an electrically insulating material made of a mixture of silicon carbide (SiC) and carbon (C) having a carbon content of not less than 3 wt % based on the mixture. The resistor is formed by sputtering of a target of the conductive material and the electrically insulating material having at least 5 wt % of carbon. The conductive material and the electrically insulating material may be respectively provided as separate targets. The conductive material is at least one metal selected from tantalum, niobium, titanium, tungsten, molybdenum, zirconium and chromium.

REFERENCES:
patent: 4173731 (1979-11-01), Takagi
patent: 4232213 (1980-11-01), Taguchi
patent: 4682143 (1987-07-01), Chu
patent: 4732701 (1988-03-01), Nishii
patent: 4753903 (1988-06-01), Saito
Tomohiro Nakamori, Taiji Tsuruoka, Susumu Shibata, "Ta-Si-C High Resistivity Thin Films For Thermal Printing Heads", lectured on Mar. 27, 1987 at Keio University, published in a Report by OKI Electric Industry Co., Ltd. on Mar. 15, 1987. (English)
Tomohiro Nakamori, Yasuharu Tsuruoka, Takashi Kanamori, Susumu Shibata, "High Resistivity Thin Films for Thermal Printing Head Heating Elements", lectured on Jul. 24, 1987 at Aoyama Gakuin, University, published same date. (English translation)
Tomohiro Nakamoti, Taiji Tsuruoka, Takashi Kanamori, Susumu Shibata "Effect of Film Thickness and Heat Treatment on Ta-Si-C Thin Films for Thermal Printing Heads", published by OKI Electric Industry Co., Ltd. on Oct. 17, 1987. (English translation)
Tomohiro Nakamori, Taiji Tsuruoka, Takashi Kanamori and Susumu Shibata, "Effect of Film Thickness on Ta-Si-C High Resistivity Thin Films for Thermal Printing Heads", in The Transactions of the IEICE (vol. E 70, No. 11, Nov. 1987), pp. 1133-1139.
Tomohiro Nakamori, Taiji Tsuruoka Takashi Kanamori, and Susumu Shibata, "Ta-Si-C High Resistivity Thin Films for Thermal Printing Heads," in IEEE Transactions on Components, Hybrids, and Manufacturing Technology (vol. CHMT-10, No. 3, Sep. 1987), pp. 446-451.

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