Heating pressure processing apparatus

Details Heating pressure processing apparatus Heating pressure processing apparatus

1998-03-25

1999-11-09

Gerrity, Stephen F.

Presses

With additional treatment of material

Separating materials

100305, 100317, 118719, 118725, B30B 1534

Patent

active

059793066

ABSTRACT:
A heating pressure processing apparatus in which gas sealing property and safety can be ensured, and economic property can be improved in heating pressure processing of workpieces such as Si wafers sheet by sheet. A processing vessel 1 formed of vessel components 2, 3 is divided into at least two parts or more in the axial direction thereof and has a seal ring 9 provided in the divided parts of the vessel components 2, parts 3 in such a manner as to be replaceable. The vessel components 2, 3 have shaped parts forming a processing space 5 for a workpiece 4 when the divided parts are sealed through the seal ring 9, the vessel components 2, 3 also having cooling means 10 for the seal ring 9. A ram is provided 18 for pressing the vessel components 2, 3 in the axial direction of the vessel in order to ensure the sealing in the divided parts; and a gas introducing device 20 is provided for introducing a pressurized gas to the processing space 5 in order to process the workpiece.

REFERENCES:
patent: 5297480 (1994-03-01), Miyashita et al.
patent: 5518771 (1996-05-01), Jeffryes et al.
patent: 5735196 (1998-04-01), Jordan et al.
patent: 5792271 (1998-08-01), Fujikawa et al.

Affiliated with

Also associated with

Rating

Heating pressure processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heating pressure processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heating pressure processing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1442547