Heating plate for heating an object placed on its surface and ch

Details Heating plate for heating an object placed on its surface and ch Heating plate for heating an object placed on its surface and ch

1996-02-08

1997-06-03

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

118725, H05B 368, C23C 1600

Patent

active

056350937

ABSTRACT:
A heating floor or plate for heating an object such as a substrate placed on its surface. A plate is provided whose surface temperature can be accurately adjusted so that the heat quantity supplied by two surface zones of the plate can be different even if the zones are small and contiguous. The plate has n zones, each having placed therein an electrically conducting heating element. n+1 sensors are used to measure the temperature of the plate, where n is an integer greater than 1. Data output from the sensors is processed and compared with at least one reference value and the result used to regulate the intensity of the current flowing in the elements based on the comparison.

REFERENCES:
patent: 3781523 (1973-12-01), Borom
patent: 4394564 (1983-07-01), Dills
patent: 4889723 (1989-12-01), Pajares
patent: 4940886 (1990-07-01), Kicherer
patent: 5001423 (1991-03-01), Abrami
patent: 5059770 (1991-10-01), Mahawili
patent: 5227610 (1993-07-01), Schultheis
patent: 5294778 (1994-03-01), Carman et al.

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