Heating lamp assembly for ccvd reactors

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

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Details

118 501, 118641, 219347, 219405, 350610, H05B 100, F21V 2900, G02B 510

Patent

active

049084950

ABSTRACT:
A heating lamp assembly for use with semiconductor reactors has a reflector assembly constructed of tubes joined together by heat conductive spacers to provide for water cooling of the reflector assembly, has mounting pins for providing variable spacing of heating lamps, and water manifolds on each side of the reflector assembly for directing water through the cooling tubes. One or more blocking gates are mounted on the lamp mounting pins to direct cooling air flow across the heating lamps.

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patent: 4443059 (1984-04-01), Wells
patent: 4503807 (1985-03-01), Nakayama et al.
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