Heating furnace

Details Heating furnace Heating furnace

1996-07-26

1998-02-10

Bennett, Henry A.

Heating

Accessory means for holding, shielding or supporting work...

432 5, 432 6, 432 11, 432241, F27D 500

Patent

active

057162077

ABSTRACT:
A heating furnace and a method for uniformly thermo-setting a paste applied onto the surface of a substrate, and for manufacturing a high quality substrate. The heating furnace can be installed in a small area. A plurality of up-and-down moving pins are provided in a furnace body. The plurality of up-and-down moving pins are penetrating a hot plate having a heater and are vertically movable. A substrate loaded through an opening port in an isolation wall is mounted onto the up-and-down moving pins moved in their upper position. The substrate moved down near the hot plate using the up-and-down moving pins is preheated by the heated hot plate. Then, the substrate is further moved down and vacuum attracted to the hot plate to be heated by the hot plate. After that, the substrate is moved up to the original position and nitrogen gas from nozzles of a gas supply pipe is blown on the surface of the substrate to accelerate cooling of the substrate. After being cooled, the substrate is unloaded through the opening port.

REFERENCES:
patent: 4591044 (1986-05-01), Ogami et al.
patent: 4775317 (1988-10-01), Schulke et al.
patent: 5055036 (1991-10-01), Asano et al.
patent: 5090900 (1992-02-01), Rudolf et al.
patent: 5207578 (1993-05-01), Sakata
patent: 5273423 (1993-12-01), Shiraiwa
patent: 5480300 (1996-01-01), Okoshi et al.
patent: 5482558 (1996-01-01), Watanabe et al.

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