Heating elements for thermal ink jet devices

Details Heating elements for thermal ink jet devices Heating elements for thermal ink jet devices

1989-05-22

1990-08-21

Hartary, Joseph W.

Recorders

Performance of multiple functions of steam and gas engines

Pressure responsive element

346140R, 437241, B41J 205

Patent

active

049510630

ABSTRACT:
A thermal ink jet printhead is improved by a specific heating element structure and method of manufacture. The heating elements each have a resistive layer, a high temperature deposited plasma or pyrolytic silicon nitride thereover of predetermined thickness to electrically isolate a subsequently formed cavitational stress protecting layer of tantalum thereon. The pyrolytic silicon nitride permits wet chemical or dry plasma etching delineation of the tantalum without deleterious impact on the silicon nitride, while the delineated tantalum can serve as mask for the wet etch delineation of the silicon nitride. Because of the high deposition temperatures, the aluminum electrodes are patterned and passivated last. Such a construction lowers the manufacturing cost and concurrently provides a more durable printhead.

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