Heating element with a diamond sealing material

Details Heating element with a diamond sealing material Heating element with a diamond sealing material

1997-02-28

1999-11-02

Pelham, Jospeh

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219390, 219544, 219553, 118728, 338238, H05B 344, H05B 348, H05B 318, H01C 103

Patent

active

059775190

ABSTRACT:
A substrate support plate including a heating element for use in a process chamber is described. The heating element includes an outer sheath, a heating filament and a thermally-conductive and electrically insulative sealing material. The sealing material comprises a diamond powder.

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