Heating element CVD system and connection structure between...

Details Heating element CVD system and connection structure between... Heating element CVD system and connection structure between...

2007-05-01

2007-05-01

Moore, Karla (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230HC, C118S050100, C219S390000, C219S490000, C219S541000

Reexamination Certificate

active

10673238

ABSTRACT:
A heating element CVD system wherein one or a plurality of connection terminal holders is placed in the processing container, and each of the connection terminal holders holds a plurality of connection terminals. Each of the connection terminals connects the heating element to the electric power supply mechanism electrically such that a connection region of the heating element connected to the connection terminal is not exposed to a space in the processing container.

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patent: WO 200225712 (2002-03-01), None

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