Heating device of the light irradiation type and holding device

Details Heating device of the light irradiation type and holding device Heating device of the light irradiation type and holding device

1999-08-09

2000-12-19

Walberg, Teresa

Electric resistance heating devices

Heating devices

Radiant heater

118500, 118728, 219390, F26B 330

Patent

active

061636487

ABSTRACT:
A heating device of the light irradiation type and a holding device which can be used for it, in which it is possible to easily effect control to make the temperature of the semiconductor wafer uniform without distortion of the guard ring occurring, even if the same heating device is used for heating semiconductor wafers of different sizes is achieved by the fact that a substrate which is subjected to heat treatment by light irradiation is fixed by not only by a guard ring but also by a concentrically disposed annular auxiliary ring with a heat capacity per unit of area which is equal to the heat capacity of the guard ring. Furthermore, several guard rings can be concentrically arranged with the outermost guard ring being fixed by a guard ring support frame.

REFERENCES:
patent: 4535227 (1985-08-01), Shimizu
patent: 5527393 (1996-06-01), Sato et al.
patent: 5534072 (1996-07-01), Mizuno et al.

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