Heating device, heat treatment apparatus having the heating...

Electric resistance heating devices – Heating devices – Radiant heater

Reexamination Certificate

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Details

C392S416000, C392S418000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

06876816

ABSTRACT:
A heat treatment apparatus achieves a uniform and rapid temperature rise of an object to be processed. A plurality of double-end lamps heat the object to be processed so as to apply a heat treatment process to the object. A plurality of reflectors reflect radiation heat of the double-end lamps toward the object to be processed. Each of the double-end lamps includes a rectilinear light-emitting part and at least two double-end lamps among the plurality of double-end lamps are arranged along a longitudinal direction of the light-emitting part, or each of the double-end lamps includes a rectilinear light-emitting part and the plurality of double-end lamps are arranged so that the light-emitting parts are parallel to each other and positioned in at least two stages.

REFERENCES:
patent: 4857704 (1989-08-01), Jannot et al.
patent: 5427620 (1995-06-01), DeBoer et al.
patent: 5951896 (1999-09-01), Mahawili
patent: 6122440 (2000-09-01), Campbell
patent: 6156079 (2000-12-01), Ho et al.
patent: 6310328 (2001-10-01), Gat
patent: 0374511 (1990-06-01), None
patent: 0848575 (1998-06-01), None
patent: 2001210604 (2001-03-01), None
patent: 0034986 (2000-06-01), None

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