Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2005-04-05
2005-04-05
Fuqua, Shawntina (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S416000, C392S418000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100
Reexamination Certificate
active
06876816
ABSTRACT:
A heat treatment apparatus achieves a uniform and rapid temperature rise of an object to be processed. A plurality of double-end lamps heat the object to be processed so as to apply a heat treatment process to the object. A plurality of reflectors reflect radiation heat of the double-end lamps toward the object to be processed. Each of the double-end lamps includes a rectilinear light-emitting part and at least two double-end lamps among the plurality of double-end lamps are arranged along a longitudinal direction of the light-emitting part, or each of the double-end lamps includes a rectilinear light-emitting part and the plurality of double-end lamps are arranged so that the light-emitting parts are parallel to each other and positioned in at least two stages.
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Sakuma Takeshi
Shigeoka Takashi
Crowell & Moring LLP
Fuqua Shawntina
Tokyo Electron Limited
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