Heating device for semiconductor wafers

Details Heating device for semiconductor wafers Heating device for semiconductor wafers

1998-05-14

1999-10-19

Pelham, Joseph

Electric resistance heating devices

Heating devices

Radiant heater

392411, 219405, 219411, 219494, 118725, 25049222, 2504951, C23C 1600, H05B 3500, F27B 514, F27D 1102

Patent

active

059702141

ABSTRACT:
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. In particular, the light energy sources are positioned such that many different radial heating zones are created on a wafer being heated. The light energy sources form concentric rings. Tuning light sources are then placed in between the concentric rings of light.

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