Heating device for heating semiconductor wafers in thermal...

Details Heating device for heating semiconductor wafers in thermal... Heating device for heating semiconductor wafers in thermal...

2006-04-06

2009-10-27

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

07608802

ABSTRACT:
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. The light energy sources can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be either active sources of light energy or passive sources which reflect, refract or absorb light energy. For instance, in one embodiment, the tuning devices can comprise a lamp spaced from a focusing lens designed to focus determined amounts of light energy onto a particular location of a wafer being heated.

REFERENCES:
patent: 3623712 (1971-11-01), McNeilly et al.
patent: 3761678 (1973-09-01), Eckles
patent: 3796182 (1974-03-01), Rosler
patent: 3830194 (1974-08-01), Benzing et al.
patent: 3836751 (1974-09-01), Anderson
patent: 3862397 (1975-01-01), Anderson et al.
patent: 4001047 (1977-01-01), Boah
patent: 4041278 (1977-08-01), Boah
patent: 4047496 (1977-09-01), McNeilly et al.
patent: 4048955 (1977-09-01), Anderson
patent: 4081313 (1978-03-01), McNeilly et al.
patent: 4097226 (1978-06-01), Erikson et al.
patent: 4115163 (1978-09-01), Gorina et al.
patent: 4184065 (1980-01-01), Nagashima
patent: 4221956 (1980-09-01), Fielding et al.
patent: 4224504 (1980-09-01), Erikson et al.
patent: 4389970 (1983-06-01), Edgerton
patent: 4428647 (1984-01-01), Sprague et al.
patent: 4434189 (1984-02-01), Zaplatynsky
patent: 4436985 (1984-03-01), Weber
patent: 4446817 (1984-05-01), Crawley
patent: 4470369 (1984-09-01), Edgerton
patent: 4477718 (1984-10-01), Crain et al.
patent: 4496828 (1985-01-01), Kusmierz et al.
patent: 4504323 (1985-03-01), Arai et al.
patent: 4504730 (1985-03-01), Shimizu
patent: 4508960 (1985-04-01), Arai
patent: 4511788 (1985-04-01), Arai et al.
patent: 4517448 (1985-05-01), Crain et al.
patent: 4533820 (1985-08-01), Shimizu
patent: 4540876 (1985-09-01), McGinty
patent: 4543472 (1985-09-01), Arai et al.
patent: 4544418 (1985-10-01), Gibbons
patent: 4545327 (1985-10-01), Campbell et al.
patent: 4550245 (1985-10-01), Arai et al.
patent: 4551616 (1985-11-01), Buttery
patent: 4558660 (1985-12-01), Nishizawa et al.
patent: 4567352 (1986-01-01), Mimura et al.
patent: 4571486 (1986-02-01), Arai et al.
patent: 4581520 (1986-04-01), Vu et al.
patent: 4607591 (1986-08-01), Stitz
patent: 4615294 (1986-10-01), Scapple et al.
patent: 4632056 (1986-12-01), Stitz et al.
patent: 4632057 (1986-12-01), Price et al.
patent: 4640224 (1987-02-01), Bunch et al.
patent: 4642243 (1987-02-01), Yamazaki
patent: 4649261 (1987-03-01), Sheets
patent: 4653428 (1987-03-01), Wilson et al.
patent: 4654509 (1987-03-01), Robinson et al.
patent: 4680451 (1987-07-01), Gat et al.
patent: 4694143 (1987-09-01), Nishimura et al.
patent: 4698486 (1987-10-01), Sheets
patent: 4761538 (1988-08-01), Chiba et al.
patent: 4789771 (1988-12-01), Robinson et al.
patent: 4796562 (1989-01-01), Brors et al.
patent: 4806321 (1989-02-01), Nishizawa et al.
patent: 4817558 (1989-04-01), Itoh
patent: 4820377 (1989-04-01), Davis et al.
patent: 4820906 (1989-04-01), Stultz
patent: 4830700 (1989-05-01), Davis et al.
patent: 4832777 (1989-05-01), Davis et al.
patent: 4832778 (1989-05-01), Davis et al.
patent: 4832779 (1989-05-01), Fisher et al.
patent: 4836138 (1989-06-01), Robinson et al.
patent: 4854263 (1989-08-01), Chang et al.
patent: 4857139 (1989-08-01), Tashiro et al.
patent: 4857704 (1989-08-01), Jannot et al.
patent: 4859832 (1989-08-01), Uehara et al.
patent: 4901670 (1990-02-01), Ahlgren
patent: 4908495 (1990-03-01), Ishii et al.
patent: 4911103 (1990-03-01), Davis et al.
patent: 4913929 (1990-04-01), Moslehi et al.
patent: 4919077 (1990-04-01), Oda et al.
patent: 4920918 (1990-05-01), Adams et al.
patent: 4924073 (1990-05-01), Chiba
patent: 4924807 (1990-05-01), Nakayama et al.
patent: RE33274 (1990-07-01), Burnham et al.
patent: 4956538 (1990-09-01), Moslehi
patent: 4958061 (1990-09-01), Wakabayashi et al.
patent: 4975561 (1990-12-01), Robinson et al.
patent: 4979466 (1990-12-01), Nishitani et al.
patent: 4981815 (1991-01-01), Kakoschke
patent: 4985281 (1991-01-01), Ahlgren
patent: 4989544 (1991-02-01), Yoshikawa
patent: 5000113 (1991-03-01), Wang et al.
patent: 5011794 (1991-04-01), Grim et al.
patent: 5038395 (1991-08-01), Lenski
patent: 5044943 (1991-09-01), Bowman et al.
patent: 5047611 (1991-09-01), Stultz
patent: 5053247 (1991-10-01), Moore
patent: 5057668 (1991-10-01), Gisdakis et al.
patent: 5073698 (1991-12-01), Stultz
patent: 5085887 (1992-02-01), Adams et al.
patent: 5108792 (1992-04-01), Anderson et al.
patent: 5113929 (1992-05-01), Nakagawa et al.
patent: 5129360 (1992-07-01), Ahern et al.
patent: 5148714 (1992-09-01), McDiarmid
patent: 5154512 (1992-10-01), Schietinger et al.
patent: 5155337 (1992-10-01), Sorrell et al.
patent: 5156820 (1992-10-01), Wong et al.
patent: 5160545 (1992-11-01), Maloney et al.
patent: 5179677 (1993-01-01), Anderson et al.
patent: 5188058 (1993-02-01), Nakai
patent: 5194401 (1993-03-01), Adams et al.
patent: 5207835 (1993-05-01), Moore
patent: 5215588 (1993-06-01), Rhieu
patent: 5244501 (1993-09-01), Nakayama et al.
patent: 5252132 (1993-10-01), Oda et al.
patent: 5252366 (1993-10-01), Ahern et al.
patent: 5259881 (1993-11-01), Edwards et al.
patent: 5268989 (1993-12-01), Moslehi et al.
patent: 5269847 (1993-12-01), Anderson et al.
patent: 5288364 (1994-02-01), Burt et al.
patent: 5304357 (1994-04-01), Sato et al.
patent: 5305417 (1994-04-01), Najm et al.
patent: 5308161 (1994-05-01), Stein
patent: 5314538 (1994-05-01), Maeda et al.
patent: 5315092 (1994-05-01), Takahashi et al.
patent: 5317492 (1994-05-01), Gronet et al.
patent: 5326171 (1994-07-01), Thompson et al.
patent: 5332442 (1994-07-01), Kubodera et al.
patent: 5332883 (1994-07-01), Higashira
patent: 5345534 (1994-09-01), Najm et al.
patent: 5348587 (1994-09-01), Eichman et al.
patent: 5364667 (1994-11-01), Rhieu
patent: 5366554 (1994-11-01), Kanai et al.
patent: 5367606 (1994-11-01), Moslehi et al.
patent: 5372648 (1994-12-01), Yamamoto et al.
patent: 5380682 (1995-01-01), Edwards et al.
patent: 5414244 (1995-05-01), Imahashi
patent: 5418885 (1995-05-01), Hauser et al.
patent: 5444217 (1995-08-01), Moore et al.
patent: 5444815 (1995-08-01), Lee et al.
patent: 5445675 (1995-08-01), Kubodera et al.
patent: 5446824 (1995-08-01), Moslehi
patent: 5446825 (1995-08-01), Moslehi et al.
patent: 5449883 (1995-09-01), Tsuruta
patent: 5451260 (1995-09-01), Versteeg et al.
patent: 5478609 (1995-12-01), Okamura
patent: 5480489 (1996-01-01), Hasegawa
patent: 5482557 (1996-01-01), Kanai et al.
patent: 5493987 (1996-02-01), McDiarmid et al.
patent: 5501739 (1996-03-01), Yamada et al.
patent: 5505779 (1996-04-01), Mizuno et al.
patent: 5518549 (1996-05-01), Hellwig
patent: 5525160 (1996-06-01), Tanaka et al.
patent: 5534072 (1996-07-01), Mizuno et al.
patent: 5539855 (1996-07-01), Takahashi et al.
patent: 5551982 (1996-09-01), Anderson et al.
patent: 5551985 (1996-09-01), Brors et al.
patent: 5561735 (1996-10-01), Camm
patent: 5565382 (1996-10-01), Tseng et al.
patent: 5571749 (1996-11-01), Matsuda et al.
patent: 5576059 (1996-11-01), Beinglass et al.
patent: 5587019 (1996-12-01), Fujie
patent: 5595606 (1997-01-01), Fujikawa et al.
patent: 5599397 (1997-02-01), Anderson et al.
patent: 5609689 (1997-03-01), Kato et al.
patent: 5624499 (1997-04-01), Mizuno et al.
patent: 5624590 (1997-04-01), Fiory
patent: 5635409 (1997-06-01), Moslehi
patent: 5637175 (1997-06-01), Feygin et al.
patent: 5683173 (1997-11-01), Gronet et al.
patent: 5689614 (1997-11-01), Gronet et al.
patent: 5808272 (1998-09-01), Sun et al.
patent: 5820942 (1998-10-01), Singh et al.
patent: 5874711 (1999-02-01), Champetier et al.
patent: 5876550 (1999-03-01), Feygin et al.
patent: 5908307 (1999-06-01), Talwar et al.
patent: 5930456 (1999-07-01), Vosen
patent: 5954982 (1999-09-01), Sogard
patent: 5960158 (1999-09-01), Gat et al.
patent: 5970213 (1999-10-01), Cord et al.
patent: 5970214 (1999-10-01), Gat
patent

Affiliated with

Also associated with

Rating

Heating device for heating semiconductor wafers in thermal... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heating device for heating semiconductor wafers in thermal..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heating device for heating semiconductor wafers in thermal... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4077362