Heating crucible for organic thin film forming apparatus

Details Heating crucible for organic thin film forming apparatus Heating crucible for organic thin film forming apparatus

2011-06-14

2011-06-14

Paik, Sang Y (Department: 3742)

Electric resistance heating devices

Heating devices

Vaporizer

C118S726000

Reexamination Certificate

active

07962016

ABSTRACT:
Provided is a heating crucible for an organic thin film forming apparatus, the heating crucible including a main body in which to contain an organic substance, a cover provided on the main body, the cover formed of an insulating material and having a nozzle through which a gaseous organic substance comes out from the main body, a cover heater formed as a thin film type on the top surface of the cover, and a body heater heating the main body.

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