Heating apparatus with enhanced thermal uniformity and...

Details Heating apparatus with enhanced thermal uniformity and... Heating apparatus with enhanced thermal uniformity and...

2011-03-08

2011-03-08

Kachar, Ram N (Department: 1716)

Coating apparatus

Gas or vapor deposition

C118S724000, C118S725000, C156S345370, C156S345470, C156S345510, C156S345520

Reexamination Certificate

active

07901509

ABSTRACT:
A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.

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