Heating apparatus with electrostatic attraction function

Details Heating apparatus with electrostatic attraction function Heating apparatus with electrostatic attraction function

2005-07-12

2005-07-12

Evans, Robin O. (Department: 3742)

Electric heating

Heating devices

With heating unit structure

C219S444100, C219S544000, C219S553000, C361S234000

Reexamination Certificate

active

06917021

ABSTRACT:
There is disclosed a heating apparatus with electrostatic attraction function1, comprising at least a supporting base2, an electrode for electrostatic attraction4and a heating layer5that are formed on the supporting base, and an insulating layer6that is formed on the electrode for electrostatic attraction and the heating layer, wherein the electrode for electrostatic attraction and/or the heating layer are/is composed of pyrolytic graphite containing boron and/or boron carbide of 0.001-30% by weight in terms of boron concentration, and the insulating layer has an electric resistivity of 106-1015Ωcm. There is provided a heating apparatus with electrostatic attraction function, which has a high thermal shock resistance, no problem of delamination, a proper resistance value, and a sufficient electrostatic attraction force even in a medium and high temperature range of 500-800° C., which causes no breakage of devices due to leakage current, and which can be used stably during rapid rise and rapid drop in temperature.

REFERENCES:
patent: 5606484 (1997-02-01), Kawada et al.
patent: 5665260 (1997-09-01), Kawada et al.
patent: 5748436 (1998-05-01), Honma et al.
patent: 6140624 (2000-10-01), Gilbert, Sr.
patent: 6242719 (2001-06-01), Kano et al.
patent: 6294771 (2001-09-01), Katsuda et al.
patent: 6384383 (2002-05-01), Kano et al.
patent: 6410172 (2002-06-01), Gilbert, Sr.
patent: 6423615 (2002-07-01), Ravi et al.
patent: 6462928 (2002-10-01), Shamouilian et al.
patent: 6490146 (2002-12-01), Wang et al.
patent: 6535371 (2003-03-01), Kayamoto et al.
patent: 6678143 (2004-01-01), Masuda et al.
patent: 52-067353 (1977-06-01), None
patent: 59-124140 (1984-07-01), None
patent: 04-124076 (1992-04-01), None
patent: 04-358074 (1992-12-01), None
patent: 05-109876 (1993-04-01), None
patent: 05-129210 (1993-05-01), None
patent: 07-010665 (1995-01-01), None
patent: 09-278527 (1997-10-01), None
patent: 2001015251 (2001-01-01), None
Toshiya Watanabe, “Electrostatic Characteristics of Ceramic Electrostatic Chuck”, New Ceramics No. 2, 1994, pp. 49-53.

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