Electric heating – Heating devices – With heating unit structure
Reexamination Certificate
2005-10-11
2005-10-11
Evans, Robin O. (Department: 3742)
Electric heating
Heating devices
With heating unit structure
C219S542000, C219S544000
Reexamination Certificate
active
06953918
ABSTRACT:
There is disclosed a heating apparatus which has an electrostatic adsorption function and which comprises at least a supporting substrate, an electrode for electrostatic adsorption formed on a surface of one side of the supporting substrate, a heating layer formed on a surface of the other side of the supporting substrate, and an insulating layer formed so that it may cover the electrode for electrostatic adsorption and the heating layer wherein a volume resistivity of the insulating layer is varied in a plane. Thus, there can be provided a heating apparatus which has an electrostatic adsorption function wherein uniformity of a temperature distribution in a plane of the wafer when the wafer is heated can be improved, and the wafer can be heat-treated uniformly.
REFERENCES:
patent: 5382469 (1995-01-01), Kubota et al.
patent: 5663865 (1997-09-01), Kawada et al.
patent: 5748436 (1998-05-01), Honma et al.
patent: 6108189 (2000-08-01), Weldon et al.
patent: 6204489 (2001-03-01), Katsuda et al.
patent: 6259592 (2001-07-01), Ono
patent: 6294771 (2001-09-01), Katsuda et al.
patent: 6678143 (2004-01-01), Masuda et al.
patent: 6687113 (2004-02-01), Saito et al.
patent: 6728091 (2004-04-01), Tsuruta et al.
patent: 6730276 (2004-05-01), Kosakai et al.
patent: 0 692 814 (1996-01-01), None
patent: A 52-67353 (1977-06-01), None
patent: A 59-124140 (1984-07-01), None
patent: A 63-241921 (1988-10-01), None
patent: A 04-124076 (1992-04-01), None
patent: A 04-358074 (1992-12-01), None
patent: A 05-109876 (1993-04-01), None
patent: A 05-129210 (1993-05-01), None
patent: A 07-10665 (1995-01-01), None
patent: 200101525 (2001-01-01), None
Toshiya Watanabe, “Electrostatic Characteristics of Ceramic Electrostatic Chuck”, New Ceramics (1994) No. 2, pp. 49-53.
Ito Kenji
Kano Shoji
Satoh Kenji
Evans Robin O.
Oliff & Berridg,e PLC
Patel Vinod
Shin-Etsu Chemical Co. , Ltd.
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