Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Reexamination Certificate
2011-08-09
2011-08-09
Gravini, Stephen M. (Department: 3743)
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
C034S058000, C034S080000, C034S235000, C219S121580, C438S509000, C438S758000, C427S444000, C427S545000, C162S375000, C162S290000, C118S058000, C118S725000
Reexamination Certificate
active
07992318
ABSTRACT:
A disclosed heating apparatus for heating a substrate on which a film is coated includes a process chamber having a gas supply opening for supplying a first gas to the process chamber and a gas evacuation opening for evacuating the first gas from the process chamber; a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate; plural protrusions arranged on the heating plate so as to support the substrate; plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate; and a gas inlet adapted to supply a second gas to a gap between the heating plate and the substrate supported by the plural protrusions.
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Kaneda Masatoshi
Kawaji Tatsuya
Sakai Yuichi
Gravini Stephen M.
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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