Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2008-05-14
2011-10-18
Campbell, Thor (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S407000, C392S411000
Reexamination Certificate
active
08041197
ABSTRACT:
A heating apparatus for heating a target object W is provided with a plurality of heating light sources, including LED elements for applying heating light having a wavelength within a range from 360 to 520 nm to the object. Thus, a temperature of only the shallow surface of the object, such as a semiconductor wafer, is increased/reduced at a high speed in uniform temperature distribution, irrespective of the film type.
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Office Acton issued Nov. 30, 2010, in Korean Patent Application No. 10-2008-7011511.
Kasai Shigeru
Suzuki Tomohiro
Campbell Thor
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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