Heater unit and semiconductor manufacturing apparatus...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...

Reexamination Certificate

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C219S443100, C219S448110, C219S448170, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C118S729000, C118S728000, C118S730000

Reexamination Certificate

active

07554059

ABSTRACT:
A ceramic heater attaining more uniform temperature distribution from the start to the end of cooling is provided. Further, in a cooling module used for cooling the heater, liquid leakage during use is prevented, degradation in cooling capability is prevented and the performance is maintained for a long period of use, and the manufacturing cost of the module is decreased. The ceramic heater includes a ceramic heater body and a cooling module cooling the heater body, and the cooling module has a structure formed by arranging a pipe in a trench formed in a plate-shaped structure.

REFERENCES:
patent: 5509471 (1996-04-01), Hallgren
patent: 6084215 (2000-07-01), Furuya et al.
patent: 6097006 (2000-08-01), Inukai
patent: 6646233 (2003-11-01), Kanno et al.
patent: 9-162578 (1997-06-01), None
patent: 2002-69652 (2002-03-01), None
patent: 2002-508587 (2002-03-01), None
patent: 2004-14655 (2004-01-01), None
patent: 2004-356555 (2004-12-01), None
patent: 2005-150506 (2005-06-01), None
patent: 2005-209981 (2005-08-01), None
patent: WO 99/49501 (1999-09-01), None
Japanese Office Action issued in corresponding Japanese Patent Application No. JP 2005-263183, dated Feb. 20, 2007.
Japanese Office Action issued in corresponding Japanese Patent Application No. JP 2005-263183, dated Nov. 28, 2006.

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