Heater stack in a micro-fluid ejection device and method for...

Details Heater stack in a micro-fluid ejection device and method for... Heater stack in a micro-fluid ejection device and method for...

2008-12-30

2011-12-06

Luu, Matthew (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S054000, C347S056000, C438S021000

Reexamination Certificate

active

08070265

ABSTRACT:
A method for forming a floating heater element includes processing a silicon substrate to form a heater stack having the heater element on the substrate with peripheral edge portions, processing the heater stack by depositing and patterning a layer of photoresist or hard mask thereon to substantially mask the heater stack and form a trench through the photoresist or hard mask exposing a surface area of the substrate extending along the peripheral edge portions of the heater element, and processing the masked heater stack and exposed surface area of the substrate by sequentially removing the photoresist and portions of the substrate at the exposed surface area and that underlie the heater element so as to create a well in the substrate undercutting the heater element and open along the peripheral edge portions thereof, the well being capable of filling with a fluid so as to produce the floating heater element.

REFERENCES:
patent: 7182439 (2007-02-01), Silverbrook
patent: 7195343 (2007-03-01), Anderson
patent: 2002/0093548 (2002-07-01), Jarrold et al.
Introduction to Microelectronic Fabrication: Modular Series on Solid State Devices; vol. V, pp. 269-280; Richard C. Jaeger, Auburn University, published Oct. 17, 2011.

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