Industrial electric heating furnaces – Glass furnace device – Joule effect heating
Patent
1996-12-11
1999-03-23
Hoang, Tu Ba
Industrial electric heating furnaces
Glass furnace device
Joule effect heating
373 36, 422429, 219420, 117 30, C03B 5027
Patent
active
058870156
ABSTRACT:
A heater mechanism for a crystal pulling apparatus is disclosed. Electrodes made of copper or the like and disposed under a heater are connected to the heater via graphite members. A cover member is attached to each graphite member, so that the downwardly extending portion of the cover member surrounds the outer surface of the graphite member. Accordingly, a leak or splash of a melt is prevented from contacting the electrodes. The length of each graphite member is equal to or greater than the distance between the bottom surface of the heater and the top surface of a melt spill tray which distance is measured when the heater mechanism is raised The cover member is vertically slidable along the outer surface of each graphite member. Thus, even when a material melt leaks out from a crucible, the electrodes of the heater mechanism can be protected from a fusion damage or the like which would be otherwise caused by the leak of the melt.
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W. Zulehner, "Czochralski Growth of Silicon", Seventh International Conference on Crystal Growth (ICCG-7), Journal of Crystal Growth, Dec. 1983, pp. 189-213.
Iwasaki Atsushi
Mitamura Nobuaki
Takeyasu Shinobu
Uesugi Toshiharu
Hoang Tu Ba
Shin-Etsu Handotai & Co., Ltd.
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