Heater inspection apparatus and semiconductor manufacturing...

Details Heater inspection apparatus and semiconductor manufacturing... Heater inspection apparatus and semiconductor manufacturing...

2006-02-21

2006-02-21

Hoang, Tu (Department: 3742)

Electric heating

Heating devices

With power supply and voltage or current regulation or...

C219S497000

Reexamination Certificate

active

07002113

ABSTRACT:
A heater inspection apparatus including an applying unit, a current detector, a voltage detector, a temperature detector, a memory, a first calculating unit, a second calculating unit and a finding unit is provided. The applying unit applies an electrical power to a heater based on an AC power source. The current detector detects a current flowing through the heater. The voltage detector detects a voltage applied to the heater. The temperature detector detects a temperature of the heater. A temperature coefficient of resistance is stored in advance on the memory. The first calculating unit and the second calculating unit respectively calculate a resistance of the heater at an inspection time and a reference time. The finding unit finds a deterioration degree of the heater based on results of the first and second calculating units.

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patent: 5280422 (1994-01-01), Moe et al.
patent: 5656190 (1997-08-01), Aoki
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patent: A 4-155828 (1992-05-01), None
patent: 2000260716 (2000-09-01), None

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