Heater for processing gases

Details Heater for processing gases Heater for processing gases

1992-11-04

1994-12-27

Paschall, Mark H.

Electric resistance heating devices

Heating devices

Continuous flow type fluid heater

392480, 392484, 392491, F24H 110, F24H 114

Patent

active

053773004

ABSTRACT:
A heater for heating processing gases used in semiconductor processing equipment; the heater including a chamber whose walls are heated by a strip heater whereby gases flowing through the chamber are heated by said heated walls.

REFERENCES:
patent: 3338476 (1967-04-01), Marcoux
patent: 3666918 (1972-05-01), Clark, Jr. et al.
patent: 3968346 (1976-07-01), Cooksley
patent: 4709135 (1987-11-01), Dietrich et al.
patent: 5206928 (1993-04-01), Sporri

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