Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Reexamination Certificate
2007-04-10
2007-04-10
Hiteshew, Felisa (Department: 1722)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
C117S218000, C117S222000, C117S900000
Reexamination Certificate
active
10503721
ABSTRACT:
The present invention provides a heater for manufacturing a crystal by the Czochralski method comprising at least terminal portions supplied with current and a heat generating portion by resistance heating, and being arranged so as to surround a crucible containing a raw material melt, wherein the heater has a uniform heat generation distribution to the raw material melt after deformation while in use during crystal manufacture. It is thus possible to prevent hindrance of monocrystallization and unstable crystal quality caused by ununiform temperature in the raw material melt due to deformation of the shape of the heater's heat generating portion while in use during crystal manufacture.
REFERENCES:
patent: 5766347 (1998-06-01), Shimomura et al.
patent: 5968266 (1999-10-01), Iino et al.
patent: 6093913 (2000-07-01), Schrenker et al.
patent: 6285011 (2001-09-01), Cherko
patent: A 2-172885 (1990-07-01), None
patent: B2 7-72116 (1995-08-01), None
patent: A 9-208371 (1997-08-01), None
patent: A 9-235178 (1997-09-01), None
patent: A 10-167876 (1998-06-01), None
patent: A 11-139895 (1999-05-01), None
patent: A 11-199371 (1999-07-01), None
patent: A 2001-39792 (2001-02-01), None
Hoshi Ryoji
Ohta Tomohiko
Sato Wataru
Sonokawa Susumu
Hiteshew Felisa
Oliff & Berridg,e PLC
Shin-Etsu Handotai & Co., Ltd.
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