Heater for high vacuum optical view port

Details Heater for high vacuum optical view port Heater for high vacuum optical view port

1999-03-05

1999-11-02

Hoang, Tu Ba

Electric heating

Heating devices

With heating unit structure

373 11, H05B 310

Patent

active

059775262

ABSTRACT:
A heated view port for in-situ optical observation of a deposition chamber in a vessel under high vacuum application comprising a plurality of superimposed layers arranged in the shape of an annular band mounted around the view port substantially at the outer periphery thereof. The band includes a first layer of pyrolytic boron nitride, a second layer of pyrolytic graphite covering at least one surface of the pyrolytic boron nitride layer, an outer layer of pyrolytic boron nitride and two electrical contact terminals in contact with the pyrolytic graphite layer in an arrangement forming parallel resistive paths between the contact terminals. The terminal contacts are connected to an external source of electrical power.

REFERENCES:
patent: 3973075 (1976-08-01), Borkowski
patent: 5343022 (1994-08-01), Gilbert, Sr. et al.

Affiliated with

Also associated with

Rating

Heater for high vacuum optical view port does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Heater for high vacuum optical view port, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heater for high vacuum optical view port will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2138427