Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1995-02-09
1997-07-15
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
118724, H05B 368
Patent
active
056480067
ABSTRACT:
A heater for a chemical vapor deposition equipment includes a meandering heating wire made of either molybdenum or tungsten and having a diameter of about 1 mm. The heating wire is laid on a heater disc that is made of either molybdenum, tungsten or ceramic. The heater disc is holed at its center for receiving a susceptor rotating shaft. A plurality of heating wire fixtures support the heating wire on the heater disc while spacing the heating wire from the heater disc at an interval, thus to prevent the heating wire from directly contacting the heater disc. Each of the heating wire fixtures is provided with a pair of lateral through holes, that is, a heating wire hole formed in an upper section of each fixture and a fixing wire hole formed in a lower section of each fixture. The heater also includes heat resisting plates that are made of either molybdenum or tungsten and placed on the bottom surface and the side surface of the heater disc for preventing side and downward radiation of the heat of the heating wire. The heater heats a substrate to a high temperature not less than 1500.degree. C. and achieves an excellent heating efficiency.
REFERENCES:
patent: 3541305 (1970-11-01), Kuwayama et al.
patent: 3633537 (1972-01-01), Howe
patent: 4296311 (1981-10-01), Hagglund et al.
patent: 4447711 (1984-05-01), Fischer
patent: 5232509 (1993-08-01), Min et al.
Catalogue: "Tungsten" published by Metallwerk Plansee GmbH, Jun. 1988.
Catalogue: "Molybdenum" published by Metallwerk, Mar. 1988.
Kim Moo sung
Kim Seong-Il
Kim Yong
Min Suk-ki
Korea Institute of Science and Technology
Paik Sam
Walberg Teresa J.
LandOfFree
Heater for chemical vapor deposition equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Heater for chemical vapor deposition equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heater for chemical vapor deposition equipment will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1490445