Electric heating – Heating devices – Resistive element: igniter type
Patent
1984-06-11
1985-05-21
Smith, John D.
Electric heating
Heating devices
Resistive element: igniter type
219275, 373110, 118726, 156DIG103, C23C 1312
Patent
active
045188467
ABSTRACT:
In a molecular beam epitaxy furnace, a heater is described for heating the interior of an effusion cell. The heater includes an outer cylindrical sleeve having one end connected to receive a vacuum, and an opposite end extending into the furnace. An inner sleeve is provided coaxial with the outer cylindrical sleeve, one end of the inner sleeve being sealed with the opposite end of the cylindrical sleeve. The inner sleeve extends along a portion of the outer cylindrical sleeve providing an interior vacuum chamber. A heating element is disposed between the cylindrical sleeve and inner sleeve which heats the interior crucible receiving chamber and a crucible therein bearing semiconductor constituent material such that the semiconductor constituent material effuses without contamination from the heating element.
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Freeouf John L.
Jackson Thomas N.
International Business Machines - Corporation
Plantz Bernard F.
Smith John D.
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