Heater

Details Heater Heater

2007-09-25

2007-09-25

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S390000, C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C118S728000, C118S729000

Reexamination Certificate

active

11498378

ABSTRACT:
A heater includes a heating member formed in a plate shape that includes a substrate-heating surface on which a substrate is mounted and a heating member rear surface which is on the opposite side of the substrate-heating surfaces. The heater also has a resistance heating element embedded therein. An auxiliary member is placed on the side of the heating member rear surface of the heating member and has an opposing surface which opposes the heating member rear surface. A planar gas path for gas ejected on the substrate-heating surface is formed between the heating member rear surface and the opposing surface.

REFERENCES:
patent: 6223447 (2001-05-01), Yudovsky et al.
patent: 6494955 (2002-12-01), Lei et al.
patent: 7072579 (2006-07-01), Kusuda
patent: 2002-093894 (2002-03-01), None

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